’’  utf-8Ač° L@P& has 8 factorial runs full resolution. Notes’’.„’ź"<00!40V N¬:ē’@Ī\Pattern -----+-+--+++--+-+++-+++000000 Run Order  c c@ @@@@@@"@?š@$ Bulk Flow c5 cCoding({60, 180})’’’’@N@N@N@N@f€@f€@f€@f€@^@^CF4 flow c3 cCoding({5, 15})’’’’@@@.@.@@@.@.@$@$Power c6 cCoding({550, 700})’’’’@0@…ą@0@…ą@0@…ą@0@…ą@ƒˆ@ƒˆ Selectivity c c@%Ü(õĀ\@$aG®zā@®zįG®@Ā\(õĆ@3œ(õĀ\@1€@(ė…øQė@'Š=p£× @'8Qė…ø@&W =p£× Etch rate c c@„,@©B@§š@¬l@¦®@¬¾@§Ŗ@­Ģ@Ŗd@©¾Etch rate non-unif c c@'ffffff@%™™™™™š@"@ 333333@*@(ffffff@$™™™™™š@"™™™™™š@$™™™™™š@&333333