utf-8Am& has 8 factorial runs full resolution. Notes&o20#8#3LHD Bulk Flow c c@N@N@N@N@f@f@f@fCF4 flow c c@@@.@.@@@.@.Power c c@0@@0@@0@@0@ Selectivity c c@%(\@$aGz@zG@\(@3(\@1@(Q@'=p Etch rate c c@,@B@@l@@@@Etch rate non-unif c c@'ffffff@%@"@ 333333@*@(ffffff@$@"