Z  windows-1252\UVariability Chart(Variability Chart(Y( :Oxide removed), X( :Pressure, :Power, :Name("CHF3:CF4 Ratio"), :Etcher), Connect Cell Means(1), Std Dev Chart(1), SendToReport(Dispatch({"Variability Chart for Oxide removed"}, "2", ScaleBox, {Scale(Linear), Format(Fixed Dec, 0), Min(2750), Max(5050), Inc(1000), Minor Ticks(1)}), Dispatch({"Variability Chart for Oxide removed"}, "Variability Chart", FrameBox, Frame Size(360, 149)), Dispatch({"Variability Chart for Oxide removed"}, "", NomAxisBox, Rotated Tick Labels(1)), Dispatch({"Variability Chart for Oxide removed"}, "2", ScaleBox(2), {Scale(Linear), Format(Fixed Dec, 0), Min(0), Max(225), Inc(100)}), Dispatch({"Variability Chart for Oxide removed"}, "Varability Std Chart", FrameBox, Frame Size(360, 71)), Dispatch({"Variability Chart for Oxide removed"}, "", NomAxisBox, Rotated Tick Labels(1))))): x  Zl,'QK$$1I, Ag!!'i(kWafer  .   ??????????@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@ @ @ @ @ @ @ @ @ @ @"@"@"@"@"@"@"@"@"@" Run order  c. c  @@@@@@@@@@@ @ @ @ @ @ @ @ @ @ @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@??????????@@@@@@@@@@@@@@@@@@@@@"@"@"@"@"@"@"@"@"@"Pressure  c. c  @i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@i@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@r@o@@o@@o@@o@@o@@o@@o@@o@@o@@o@Power  c. c  @@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@@CHF3:CF4 Ratio1  c. c  @@@@@@@@@@??????????@@@@@@@@@@??????????@@@@@@@@@@??????????@@@@@@@@@@????????????????????CHF3:CF4 Ratio &  4 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 11 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 4 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 11 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 4 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 11 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 4 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 14 to 11 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1 to 4 1.5 to 11.5 to 11.5 to 11.5 to 11.5 to 11.5 to 11.5 to 11.5 to 11.5 to 11.5 to 1CHF3  c. c  @D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@>@>@>@>@>@>@>@>@>@>CF4  c. c  @$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@$@$@$@$@$@$@$@$@$@$@D@D@D@D@D@D@D@D@D@D@4@4@4@4@4@4@4@4@4@4Etcher &  OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1OETCH4OETCH4OETCH4OETCH4OETCH4Rainbow1Rainbow1Rainbow1Rainbow1Rainbow1Site &  123451234512345123451234512345123451234512345123451234512345123451234512345123451234512345 Oxide removed  c. c  @8@33333@fffff@33333@@@rfffff@33333@fffff@@C@L33333@Xfffff@@@fffff@5fffff@!@fffff@'fffff@fffff@@@@kfffff@r@ 33333@K@33333@7@0fffff@33333@@@@@@fffff@{@@@@@;@~fffff@@gfffff@>@33333@8@fffff@33333@?33333@[@]@@33333@9fffff@33333@fffff@@L@+3333@4@{@)L@@L@@@@3333@C@@@L@@AL@fffff@fffff@@33333@33333@+@H@@?@fffff@m@33333