ÿÿN!1!1!1!1ÿÿo`ÖH<<<vDà Wafer Temp  c. c  @5@5@7@7@5@5@7@7@6@6@6@6@6@6@6 Resist Temp  c. c  @6@8@6@8@7@7@7@7@6@6@8@8@7@7@7 Spinner Temp  c. c  @6@6@6@6@5@7@5@7@5@7@5@7@6@6@6Thickness Range  c. c  @5@8@=@6@,@$@.@4@.@<@A@3@(@.@,