ÿÿ0ÿÿ$;¯,,,,,\þ Bä Wafer Temp c@5@5@7@7@5@5@7@7@6@6@6@6@6@6@6 Resist Temp c@6@8@6@8@7@7@7@7@6@6@8@8@7@7@7 Spinner Temp c@6@6@6@6@5@7@5@7@5@7@5@7@6@6@6Mean Thickness c@Ç @Ç€@Ç.@Ç!@Ç@Æí€@Ç*@Ç€@Ç"€@Ç€@Ç€@Ç€@Ç%@Ç@Ç!Range of thickness c@5@8@=@6@,@$@.@4@.@<@A@3@(@.@,