ÿÿ   windows-1252’‹Source(DataTable("Hunter") << Summary(Group( :Wafer, :O2 Flash, :PRS Ash, :Wet Clean, :Sputter, :CVD TiN), Mean( :Name("Yield (%)"))))ÿÿ> oÎe $))1"1<<<<<<0S)‡åC¡ÿ Õ « W -Wafer  c. c  ?ð@@@@@@ @"@$@(@*@.@1@3@6@8O2 Flash &  StdNoneStdNoneStdStdNoneStdNoneStdNoneNoneNoneNoneStdStdPRS Ash &  O2StdStdO2O2StdO2O2StdStdStdStdO2O2O2Std Wet Clean &  Std 15:15 min 15:15 minStd 15:15 minStdStdStdStd 15:15 minStd 15:15 min 15:15 min 15:15 min 15:15 minStdSputter &  50A50A300A50A50A300A300A300A50A50A300A300A300A50A300A50ACVD TiN &  Std2X50A2X50A2X50A2X50AStdStd2X50AStdStd2X50AStd2X50AStdStd2X50AO2 flash  c. c  ?ð?ð?ð?ð?ð?ð?ð?ðPRS ash  c. c  ?ð?ð?ð?ð?ð?ð?ð?ð Wet clean  c. c  @$@.@.@$@.@$@$@$@$@.@$@.@.@.@.@$sputter  c. c  @I@I@rÀ@I@I@rÀ@rÀ@rÀ@I@I@rÀ@rÀ@rÀ@I@rÀ@I CVD TiN 2  c. c  @>@I@I@I@I@>@>@I@>@>@I@>@I@>@>@I Yield (%)  c. c  @F@,@.@D@2@3@I€@D@9@0@.@5@9@D@C@2