ÿÿlÉØ·Source(DataTable("Untitled 7") << Subset(Output Table("Subset of Untitled 7"), Save Formula(0), Rows([55,56,57,58,59,60,61,62,63,64,65,66,67,68,69,70,71,72,118,119,120,121,122,123,124,125,126,127,128,129,130,131,132,133,134,135,136,137,138,139,140,141,142,143,144,145,146,147,148,149,150,151,152,153,154,155,156,157,158,159,160,161,162,172,173,174,175,176,177,178,179,180,181,182,183,184,185,186,187,188,189,190,191,192,193,194,195,196,197,198,199,200,201,202,203,204,205,206,207,208,209,210,211,212,213,214,215,216])))¤Variability Chart(Variability Chart(Y( :Contact Resistance ), X( :CD, :EP, :Etch Chamber, :Wafer), Connect Cell Means(1), Show Group Means(1), Std Dev Chart(0)))ÿÿ"“R'+$!Oõ« aÍCD  c. c  ?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÈQë…¸R?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá?ÊáG®zá Etch Chamber  c. c  @@@@@@@@@@@@@@@@@@@@@@@@@@@?ð?ð?ð?ð?ð?ð?ð?ð?ð@@@@@@@@@?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð?ð@@@@@@@@@@@@@@@@@@@@@@@@@@@?ð?ð?ð?ð?ð?ð?ð?ð?ð@@@@@@@@@Wafer  c. c  @@@@@@@@@@ @ @ @ @ @ @ @ @ @,@,@,@,@,@,@,@,@,@.@.@.@.@.@.@.@.@.@0@0@0@0@0@0@0@0@0@1@1@1@1@1@1@1@1@1@2@2@2@2@2@2@2@2@2@4@4@4@4@4@4@4@4@4@5@5@5@5@5@5@5@5@5@6@6@6@6@6@6@6@6@6@7@7@7@7@7@7@7@7@7@8@8@8@8@8@8@8@8@8Site ID  c. c  ?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"?ð@@@@@@@ @"Contact Resistance  c. c  @H£× =q@Gü(õÂ\@G«…¸Qì@GúáG®{@H5Â\(ö@G¹™™™™š@H\(õÂ@G]p£× =@G«…¸Qì@J®záH@I÷ =p£×@JLÌÌÌÌÍ@J!G®zá@JC× =p¤@JhõÂ\)@Jë…¸R@IŸQë…@JõÂ\)@GÓ33333@GŸQë…@GÊ=p£× @G‚\(õÃ@H¸Që…@Fñë…¸R@Gï\(õÂ@GnzáG®@F¾¸Që…@G³33333@G‘ë…¸R@G¢\(õÃ@GhõÂ\)@G· =p£×@G‘ë…¸R@G‚\(õÃ@GP£× =q@GÂ\(ö@I@HôzáG®@IHõÂ\)@IUÂ\(ö@IE¸Që…@I· =p£×@HõÂ\(ö@HÚáG®{@I‹…¸Qì@HO\(õÂ@HáG®{@H~¸Që…@Hc× =p¤@Gñë…¸R@H•Â\(ö@GÚáG®{@HW =p£×@H"\(õÃ@Hð£× =q@I~¸Që…@J+…¸Qì@Ià@J ÌÌÌÌÍ@Jc× =p¤@J7 =p£×@J =p£× @Jë…¸R@JuÂ\(ö@I¯\(õÂ@JÈõÂ\)@J@@J%¸Që…@JnzáG®@Iž¸Që…@IŸQë…@JK…¸Qì@GÆfffff@Gª=p£× @G· =p£×@G¹™™™™š@GÚáG®{@GÏ\(õÂ@Gb\(õÃ@FÚáG®{@Gffffff@J@Iå¸Që…@J9™™™™š@J®záH@I‘ë…¸R@J:áG®{@IÞ¸Që…@I‘ë…¸R@Jp£× =@H£× =q@H\(õÂ\@Hg®záH@H‡®záH@HHõÂ\)@HÝp£× =@GîzáG®@H‚\(õÃ@HB\(õÃ@HÔzáG®@H½p£× =@I‚\(õÃ@I(õÂ\)@I …¸Qì@H˜Që…¸@HîzáG®@H5Â\(ö@HO\(õÂ