'N,   !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~78F*.30)*7<4)&3F,(09?1;).8*07%F<+)0}HVVGW_iUy{NlDUU]ngppuurrc}x~gmUrrsoxvwb]skgx~ggdrrsx  #!#$%&^&()L*+,-/L023$3479;<=>[@2ABCDEF\H3J KlLN0OOQ<RT.UW XZ[]^`acdfgijlmoprsuvxy{|~ }yuxvu}ytpmed`SLOTNUM2   161286017 161286017 161286017 161286017 161286017 161286018 161286018 161286018 161286018 161286018 161288017 161288017 161288017 161288017 161288017 161288018 161288018 161288018 161288018 161288018 161286015 161286015 161286015 161286015 161286016 161286016 161286016 161286016 161286016 161288015 161288015 161288015 161288015 161288015 161288016 161288016 161288016 161288016 161288016 BL0 BL0AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD CRR CRRAL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD P2R P2RAL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD ESR ESRAL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL AL RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD RD LAM LAMALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL ALALALAL RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD RDRDRDRD Column 1  ALALALAL1 ALALALAL1 ALALALAL1 ALALALAL1 ALALALAL1 ALALALAL2 ALALALAL2 ALALALAL2 ALALALAL2 ALALALAL2 ALALALAL3 ALALALAL3 ALALALAL3 ALALALAL3 ALALALAL3 ALALALAL4 ALALALAL4 ALALALAL4 ALALALAL4 ALALALAL4 RDRDRDRD1 RDRDRDRD1 RDRDRDRD1 RDRDRDRD1 RDRDRDRD1 RDRDRDRD2 RDRDRDRD2 RDRDRDRD2 RDRDRDRD2 RDRDRDRD3 RDRDRDRD3 RDRDRDRD3 RDRDRDRD3 RDRDRDRD3 RDRDRDRD4 RDRDRDRD4 RDRDRDRD4 RDRDRDRD4 RDRDRDRD4 Test Site  c  Test Site?@@@@?@@@@?@@@@?@@@@?@@@?@@@@?@@@@?@@@@ Bin Value  c  Bin Value@ @ @ @ @ @ @ @ @ @ @$@$@@ @ @ @$@ @@ @@&@ @ @ @$@ @ @@ @$@$@ @ @$@@ @ @ X Location  c  X Location??????????????????????????????????????? Y location  c  Y location???????????????????????????????????????LOTSEQ  c@0@0@0@0@0@0@0@0@0@0@1 @1 @1 @1 @1 @1 @1 @1 @1 @1 @0@0@0@0@0@0@0@0@0@1 @1 @1 @1 @1 @1 @1 @1 @1 @1 HDRREV UUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUUDATATYPE FFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFLOTNUM   1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1286061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050 1288061050KNUM 161616161616161616161616161616161616161616161616161616161616161616161616161616TESTDATE  eAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAAPCZONE  PCSTEP  CONVFAC  cSIZEX  cSIZEY  cCODE   B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWFMAJORV  MINORV  TSTCOND  PROGRAM  C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 C12020BS1 COMPILED   000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055 000210.1055SITES  c@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@V@V@V@V@V@V@V@V@V@V@Q@Q@Q@Q@Q@Q@Q@Q@Q@V@V@V@V@V@V@V@V@V@VSLOTNUM  c@@@@@@@@@@@(@(@(@(@(@(@(@(@(@(@@@@@@@@@@(@(@(@(@(@(@(@(@(@(WAFERNUM  c@1@1@1@1@1@2@2@2@2@2@1@1@1@1@1@2@2@2@2@2@.@.@.@.@0@0@0@0@0@.@.@.@.@.@0@0@0@0@0BLANK1  MAGNUM   SHIFT  cOPERATOR KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB KSB SYSTEM FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A FA01A HANDLER  TSTHDRNG  DIEFAIL  # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # # #PCCODE   B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF B52020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWF 5W2020BSWFWMAPCODE   DEVNUM  c???????????????????????????????????????TDLX  c???????????????????????????????????????TDLY  c???????????????????????????????????????STATUS W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R W R TSTMODE 070707070707070707070707070707070707070707070707070707070707070707070707070707BURIED LAYER VDP AVG  cBURIED LAYER VDP AVG@4zG@4ǮzH@4\(@4zG{@4zH@LxQ@4p =@4G{@4}p =@4R@35\(@3\(@3zG{@3:G{@3s33333@2zG@3 =p@3Q@233333@3@4}p =@4Gz@4c =p@4s33333@4zG@4zG@4Q@4Q@4(\@3\(@3h\)@3zH@3zH@3@3# =p@3zG{@3nzG@3(\@3 P1Si VDP AVG  c  P1Si VDP AVG@m@Ƨ-@n@?33333@Vu@;dZ@/w@ȴ9Xb@?33333@A7Kƨ@p =q@E@ȴ9Xb@?33333@/w@Q@E@;dZ@?33333@l@&x@Q@9XbM@Z1'@Gz@ I^5?@ =p@?33333@C$@-@\(@o@?33333@"`B@|hr@+ I@GzH@?33333@KƧP1SiO2 VDP AVG  cP1SiO2 VDP AVG@tj~@"`A@9XbM@Z1'@^5?|@+ I@5?|h@?|hs@E@hr @o@ tj~@ I^5?}@n@ lC@ 5?|h@lC@zG@ 9XbM@bM@S@$/@tj@vȴ9@r ě@r ě@bM@O;dZ@hr @ + I^@ zG{@ Q@`A7L@ XbM@Q@ I^5?@\(@S@P2SiO2 VDP AVG  cP2SiO2 VDP AVG@t@X@A@@+33333@@p@m@fffff@T@,@<@fffff@}@@@33333@x@fffff@l@h@^fffff@@<@@}@vfffff@33333@O33333@@33333@fffff@@{33333@P@l@L@@5 P2Ti VDP AVG  c  P2Ti VDP AVG@@5?|h@KƧ@bM@(\)@/w@9XbM@XbM@zG{@vȴ9X@;dZ@E@XbM@E@1&y@5?|h@zG@E@Vt@-V@/w@+ J@lC@vȴ9X@ěS@r ě@ =p @nP@I^5?}@zG@ =p@KƧ@\(@9XbN@/v@ěS@$/@GzH@ =pDPINCH VDP AVG  cDPINCH VDP AVG@*\)@% =q@)(\@-Q@'zG@,zG@(fffffg@&\)@EzG@(Gz@,W =p@-Q@+=p @,Q@.Q@)zG@&Q@)W =p@,Q@'zG@(Q@?33333@$8Q@&Q@+.zG@6ffffg@'u\(@0TzG@1J=p @)zG@'L@(p =q@&33333@'Q@/ =q@'\(@,333333@#\(\@-QRDWN PIN 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fffffUNITS=nM P2LIN3 LW CALC  cUNITS=nM P2LIN3 LW CALC@8@^@J@ @z@@j@n@@@0@j@@@@@@x@@0@@<@@P@@n@p@@n@@(@@@J@@4@Z@@rP2R10K3 RESISTANCE  cP2R10K3 RESISTANCE@"Gz@"33333@" =p@#Q@"=p @#.zG@"ǮzH@"Q@#(\)@"=p @!aGz@!(\)@ G{@!8Q@ (\@! =q@!W =p@!@!\(@!\(@#\(@# =p @"Q@"\)@#@"@" =q@#(\)@"Q@!\(@!(\@!zG@!@!\(@!=p @!@!W =p@!fffffg@!(\)P2P6K3 RESISTANCE  cP2P6K3 RESISTANCE?+ I^?/v?ȴ9Xb?ݡo?ޗO;e?lC?\(?|hr?Vt?޸Q?I^5?}?܋C%?Z1'?+?zG{?I^5?}?tj?/v?I^5?}?ܬ1&y? ěT?S?$/?n?KƧ?m?+ ?tk?$/?/w?ݡo?zG?+?O;dZ?C$?1&x?tj?dZ1?9XbMRD1X15C HFE @ 10UA  cRD1X15C HFE @ 10UA@ 333333@ =p@ffffff@ =p @\(@Q?zG@\(@ =p@zG@\(@ 333333@@=p =@ =p@zG@Q@zG@zG@ =p@ =p@ p =q@ =p@Q@ \(@Q@Gz@Q@Q@p =q@\(@\(@ =p@Q@ Q@ zG@ =p@ @ffffffRD1X15C HFE @ 70UA  cRD1X15C HFE @ 70UA@(\)?@@Gz?\(@\(?\(?=p =?333333?@333333@@ \(\@ Q@ GzH?? =p?GzH?333333@Gz@ =p@@\(@(\)@?? =p?@Gz@ zG@ =p@ zG{@ GzH@GzH@@zG{@ =p@zG@zG{RD1X15C BSUB @10uA  cRD1X15C BSUB @10uA?Q?Q?"`B?5?|h? =p?+ J?-V?-V?ȓtj~??|hs?° ě?nO?r ě?ȓtj~?ȴ9Xb?l?tj?"`??|hs?Ƨ-?lC?nP?A7Kƨ?\(?5?|h?E?ěS? =p?/w?tj?dZ1?1&?A7Kƨ?QR?"`B?ěS?333333?Ƨ-?QRRD1X15C BSUB @70uA  cRD1X15C BSUB @70uA?ļj~#?lC?Ƈ+ I?zG{?x?\(?+ I^?Ƈ+ I?E?+ I^?7KƧ?l?nO?\(?+?öE?Z1'?tj~?nO?zG{?šo?ȴ9Xb??|hs?+ I^?E?ǮzG? =p ?ffffff? =p ?333333?Z1'?tj?S?zG{@#|hs?tj~?9XbM? =p?9XbMRD1X15C VBE @ 10UA  cRD1X15C VBE @ 10UA@33334@9@ffffg@񙙙@?33333@@d@D@6ffffg@I@fffff@@@ffffg@fffff@*fffff@8@0@2fffff@33333@@fffff@fffff@)@33333@<@$@0@@@fffff@@33333@@fffff@@љ@홙@33334RD1X15C VBE @ 70UA  cRD1X15C VBE @ 70UA@33334@fffff@陙@fffff@ ffffg@@'33333@fffff@fffff@ffffg@|@@33334@@@fffff@@@@fffff@ՙ@ݙ@33334@@@ 33333@@@33334@@@@@@l@@@33334@fffffRD1X15C VCE(SAT)  cRD1X15C VCE(SAT)@F@@H33333@G@@F333333@HY@Gs33333@Jٙ@Iffffff@H@Hfffff@B @D @CY@B&fffff@B@F33334@GY@GL@Fٙ@E33333@E@F@F@Gfffffg@E@H@G@H333333@G@C333333@D @Cffffg@Bfffff@C @?33333@E@@Dٙ@D@DRD1X15C BVCBO @ 10UA  cRD1X15C BVCBO @ 10UA@(zG@(8Q@(kQ@)GzH@(zG{@(@'Q@'(\@(@(333333@*@(Q@)L@)\(@)L@'G{@(# =p@(@'Q@(QR@)Q@(Q@)\(@(p 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