| Tool Matching
and Sampling |
| Course Description: Systematic
data collection and analysis to baseline (understand) current process
and equipment behavior and identify areas for improvement. Topics
include: match tools (machines) so they can be used interchangeably
during manufacturing, establish sampling plan based on process behavior,
solve problems such as a drop in yield through analysis of existing
data, understand and reduce sources of variability (site-to-site,
lot-to-lot, chamber-to-chamber), evaluate stability over time, estimate
capability of a process to meet specifications (Cp, Cpk), and guidelines
for data collection and analysis. |
| Course Duration: One
day and a half |
| Table of Contents: |
| 1. Overview |
- What is a Process Characterization?
- References
- Big picture – SEMATECH
Qualification Plan
|
| 2. Steps in
a Process Characterization |
- 2-level and 3-level nested designs
- Planning, Data Collection, Data Analysis,
Drawing Conclusions, Reporting Results
|
| 3.
Graphical Analysis |
- Graphical Exploratory Data Analysis
- Examples
|
| 4. Sampling |
- Population and Sample
- Random and Representative Sampling
- Sample Statistics: measures of center
and spread, correlation
- Empirical Rule
|
|
| 5. Establishing Sampling Plan |
- Central Limit Theorem
- Sample size rules of thumb
- Examples of sample size determination
|
| 6. Variance Components |
- 2-level and 3-level nested designs
|
| 7. Process Stability |
|
| 8. Process Capability |
- Capability Indices (Cp, CPK)
- Common Mistakes
|
| 9. Process Matching |
- Why match?
- Methodology
- Examples
|
|
|
