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Book:
Statistical Case Studies for Industrial Process Improvement, V. Czitrom and P.D. Spagon (editors), ASA -SIAM, Alexandria, VA and Philadelphia, PA (1997), 514 pages.
Description:
The book includes 24 industrial applications of statistics by 53 authors. The case studies can be used in industry as examples of best-in-class applications of statistics, and at universities as a supplement to statistics courses.
Topics:
  • Gage (R&R) Studies
  • Passive Data Collection (current process performance)
  • Design of Experiments (DOE)
  • Statistical Process Control (SPC)
  • Equipment Reliability
Book includes:
  • Introduction to statistical topics
  • Glossary of selected statistical terms
  • Introduction to integrated circuit manufacturing
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Selected articles and book chapters:
Yield Improvement Robust Design Experiment, V. Czitrom, S. Hunter, MASM (Modeling and Analysis of Semiconductor Manufacturing) conference proceedings, 2005, pp. 280-287.
Statistics in the Semiconductor Industry, V. Czitrom, chapter 10 of Statistics in Industry, volume 22 of the Handbook of Statistics, edited by C.R. Rao and R. Khattree, 2003, Elsevier Science B.V.
Guidelines for Selecting Factors and Factor Levels in an Industrial Designed Experiment, V. Czitrom, chapter 1 of Statistics in Industry, volume 22 of the Handbook of Statistics, edited by C.R. Rao and R. Khattree, 2003, Elsevier Science B.V.
One-Factor-at-a-Time Versus Designed Experiments, V. Czitrom, The American Statistician, 53 (2), May 1999, pp. 126-131.
Robust Design Experiment to Reduce Variance Components, V. Czitrom, P. Mohammadi, M. Flemming and B. Dyas, Quality Engineering, 10, April 1998, pp. 645-655.
Matching Implant Doses Using Design of Experiments, V. Czitrom, J. Casado and A. Ros, Quality and Reliability Engineering International, 14, July 1998, pp. 211-217.
Improving Integrated Circuit Manufacture Using a Designed Experiment, V. Czitrom, J. Sniegowski and L.D. Haugh, chapter 10 of Statistical Case Studies: A Collaboration Between Academe and Industry, edited by R. Peck, L. D. Haugh and A. Goodman, ASA-SIAM 1998, pp.109-127.
Virgin Versus Recycled Wafers for Furnace Qualification: Is the Expense Justified?, V. Czitrom and J. Reece, chapter 8 of Statistical Case Studies for Industrial Process Improvement, edited by V. Czitrom and P.D. Spagon, ASA-SIAM 1997, pp. 87-104.
Using Fewer Wafers to Resolve Confounding in Screening Experiments, J. Barnett, V. Czitrom, P.W.M. John, and R. Leon, chapter 17 of Statistical Case Studies for Industrial Process Improvement, edited by V. Czitrom and P.D. Spagon, ASA-SIAM 1997, pp. 236-250.
CMP Optimization for TEOS Based Oxide Films Using a Designed Experiment, A. Maury and V. Czitrom, Future Fab International, Technology Publishing Ltd., London 1996, pp. 209-212.
SEMATECH Qual Plan: A Qualification Plan for Process and Equipment Characterization, V. Czitrom and K. Horrell, Future Fab International Technology Publishing Ltd., London 1996, pp. 45-47.
Experimental Design for Four Mixture Components with Process Variables, V. Czitrom, Communications in Statistics-Theory and Methods, A 18, December 1989, pp. 4561-4581.
An Application of Taguchi’s Methods Reconsidered, V. Czitrom, Communications in Statistics-Theory and Methods, A 18, November 1989, pp. 4105-4119.
Mixture Experiments with Process Variables: D-Optimal Orthogonal Experimental Designs, V. Czitrom, Communications in Statistics-Theory and Methods, A 17, January 1988, pp. 105-121.