Tool Matching and Sampling

Course Description: Systematic data collection and analysis to baseline (understand) current process and equipment behavior and identify areas for improvement. Topics include: match tools (machines) so they can be used interchangeably during manufacturing, establish sampling plan based on process behavior, solve problems such as a drop in yield through analysis of existing data, understand and reduce sources of variability (site-to-site, lot-to-lot, chamber-to-chamber), evaluate stability over time, estimate capability of a process to meet specifications (Cp, Cpk), and guidelines for data collection and analysis.

Course Duration: 1.5 days

Table of Contents

Part 1. Overview

What is a Process Characterization? References Big picture - SEMATECH Qualification Plan

Part 2. Steps in a Process Characterization

2-level and 3-level nested designs Planning, Data Collection, Data Analysis, Drawing Conclusions, Reporting Results

Part 3. Graphic Analysis

Graphical Exploratory Data Analysis Examples

Part 4. Sampling

Population and Sample Random and Representative Sampling Sample Statistics: measures of center and spread, correlation Empirical Rule

Part 5. Establishing Sampling Plan

Central Limit Theorem Sample size rules of thumb Examples of sample size determination

Part 6. Variance Components

2-level and 3-level nested designs Example of Central Composite Design

Part 7. Process Stability

Stability Analysis

Part 8. Process Capability

Capability Indices (Cp, CPK) Common Mistakes

9. Process Matching

Why match? Methodology Examples

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